Integrated Faraday cup and coordinate probe, Faraday cup measures the spatial position and distribution of the ion beam, and the coordinate side head measures the spatial position and attitude of the workpiece, so as to establish an The ion beam polishing machine is mainly composed of vacuum system, motion system, ion source system, electrical control and software. The vacuum system is composed of a main vacuum chamber, a secondary vacuum chamber, a plug valve connecting the main and secondary vacuum chambers, and a corresponding vacuum pump group. The motion system consists of XYZ motion mechanism and Z2 motion mechanism. The ion source is installed on the XYZ motion mechanism in the main vacuum chamber, and the high precision motion control of the ion source can be realized through the numerical control system.
product parameter
| Product Name | parameter |
|---|---|
| Machining capacity (maximum workpiece size) | Maximum size 1000mm x 600mm Maximum thickness 200mm |
| Machined surface shape | Plane, sphere, aspherical surface, free-form surface, paraboloid, etc |
| Machinable material | Quartz, microcrystal, ULE, sapphire, monocrystalline silicon, silicon carbide and so on |
| Machinable accuracy | Sub-nano machining precision, surface shape RMS < 1nm ultra-high precision machining |
| X-axis travel | ≥1050mm |
| Y-axis travel | ≥650mm |
| Z-axis travel | ≥300mm |
| ion source | German radio frequency ion source |
| averager | Germany |
| Working vacuum setup time | ≤1 hours |
| Secondary chamber vacuum setup time | ≤15 min |
| defensive function | With unexpected power, water, gas and other fault alarm protection, motion system fault protection, ion source fault protection |
| intelligent function | It has advanced functions such as intelligent one-key startup, one-key shutdown, timed startup, scheduled shutdown, reservation processing, processing protection, remote assistance, and log |
| boundary dimension | Length, width and height: 3.2m×3.8m×2.6m |
| total weight | 9 tons |
| Power consumption | Total power 18kW |
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